Driving device for ultrasonic wave motor

ABSTRACT

A driving device for an ultrasonic wave motor has a limit detecting circuit for that the drive voltage for the ultrasonic wave motor has reached a limit, and, in response, a drive voltage limiting circuit controls the drive voltage so as not to go beyond the limit value. Such control is conducted on the voltage or frequency of a signal for driving the ultrasonic wave motor. In another aspect of the invention, a drive state detecting circuit detects the drive state of the ultrasonic wave motor, and a drive frequency (or voltage) setting circuit controls the frequency (or voltage) of a signal for driving the ultrasonic wave motor so as to attain the maximum efficiency in the motor, based on the output of the drive state detecting circuit.

This is a division of application Ser. No. 07/970,956 filed Nov. 3,1992, now U.S. Pat. No. 5,376,855 which is a continuation of applicationSer. No. 07/653,701 filed Feb. 11, 1991, (abandoned).

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a driving device for an ultrasonic wavemotor for driving a movable member by means of a travelling vibrationwave generated in an elastic member by a piezoelectric member.

2. Related Background Art

Conventionally there have been proposed various types of driving devicesfor the ultrasonic wave motor.

At first the structure of an ultrasonic wave motor will be brieflyexplained with reference to the attached drawings. FIG. 1 is across-sectional view of an ultrasonic wave motor, in which a rotor(movable member) is composed of a main rotor member 100-1 and a slidingmember 100-2 which are mutually adhered. Also a stator is composed of anelastic member 100-3 and a piezoelectric member 100-4 which are mutuallyadhered. Said rotor and stator are maintained in mutual pressure contactto constitute said ultrasonic vibration motor.

FIG. 2 is a view showing the arrangement of electrodes in saidpiezoelectric member 100-4. Input electrodes 100-4a, 100-4b receive ACdrive voltages of a mutual phase difference of π/2. A common electrode100-4c is grounded. A monitor electrode 100-4d does not contribute tothe oscillation of the elastic member but provides an AC output voltagecorresponding to the vibration state of the stator.

Thus the ultrasonic wave motor consists of the main rotor member,sliding member, elastic member and piezoelectric member explained above.The structure and function of such motor will not be explained in detailas they are already known for example from the U.S. Pat. No. 4,510,411.In brief, drive voltages are supplied to said electrodes 100-4a, 100-4bof the piezoelectric member to oscillate said member, thereby generatinga travelling vibration wave in the elastic member, and driving saidrotor maintained in pressurized contact with said stator by pressurizingmeans (not shown).

A drive control device for such ultrasonic wave motor is alreadydisclosed for example in the Japanese Laid-open Patent Appln. Nos.59-204477 61-251490. These drive control devices are either (1) tocontrol the frequency of the drive voltage signals according to thevoltage obtained from the monitor electrode 100-4d, or (2) to controlthe frequency of the drive voltage signals according to the phasedifference between the wave form of the drive voltage signals applied tothe piezoelectric member 100-4 and that of the voltage signal obtainedfrom the monitor electrode 100-4d.

In addition, for driving such ultrasonic wave motor, there have beenproposed various methods by varying the drive voltage or by varying thedrive voltage and the drive frequency, as disclosed for example in theJapanese Laid-open Patent Appln. Nos. 61-124275 and 62-19276.

In the drive control of the ultrasonic wave motor, it is known that thedrive speed of the motor becomes unstable or the motor generatesabnormal noises if the frequency of the drive voltages applied to thedrive electrodes, namely the drive frequency, is selected close to theresonance frequency specific to the ultrasonic wave motor. It is alsoknown that the motor loses the drive speed rapidly and enters a veryunstable operation state if the drive frequency is selected lower thansaid resonance frequency.

FIG. 3 shows the relationship between the drive frequency and the drivespeed of the ultrasonic wave motor, in which F1 indicates the resonancefrequency specific to the ultrasonic wave motor. By dividing the entirefrequency range into regions a and b by a drive frequency F3 slightlyhigher than said resonance frequency F1, the drive frequency region asuffers the above-mentioned abnormalities in the drive, while the drivefrequency region b from said frequency F3 to a higher frequency F2 wherethe drive speed approaches to zero provides stable drive control. Theconventional drive control devices for the ultrasonic wave motor effectsthe drive control within such frequency region b.

However the present applicant has experimentally confirmed that thefollowing drawbacks are encountered even when the ultrasonic wave motoris driven with a frequency within said frequency region b allowingstable drive control:

(1) When the drive voltage is increased beyond a certain value(hereinafter called upper limit), the motor shows unstable drive speedor generates abnormal noises. This is presumably due to an undesirablerelationship between the stator and the rotor maintained in pressurecontact by the pressurizing means, induced when the amplitude of thetravelling vibration wave exceeds a certain value;

(2) On the other hand, when the drive voltage is decreased beyond acertain value (hereinafter called lower limit), the operation of theultrasonic wave motor becomes unsmooth and the motor may eventuallystop. This phenomenon is presumably due to a fact that the oscillatingforce generated by the piezoelectric member cannot overcome thepressurizing force of the pressurizing means, due to the influence ofthe load, in the contact portions of the stator and the rotor, when theamplitude of the travelling vibration wave becomes smaller than acertain value.

Thus, in the speed control of the ultrasonic wave motor, the drivefrequency may become positioned outside the region b providing stabledrive because of the above-mentioned drawbacks if the drive voltageexceeds the upper limit or decreases beyond the lower limit. Thus thedrive frequency enters the region a involving the above-mentionedunstable drive state, thus rendering the function of the ultrasonic wavemotor unstable.

In addition, in case the drive voltage is given to the drive electrodeof the motor from a power amplifier through a coil or a transformerprovided therebetween, a resonance is generated between the inductanceof such coil or transformer and the capacitance of the piezoelectricmember, whereby the drive voltage on the drive electrode may fluctuatedepending on the drive frequency even if the output voltage of the poweramplifier is maintained constant. As a result, even if the drivefrequency is selected at the middle of the region b, the drive frequencymay be shifted from the stable region b due to fluctuation in the drivevoltage, whereby the function of the ultrasonic wave motor may becomeunstable due to such unstable drive frequency.

A first aspect of the present invention, to be explained later, is tocontrol the magnitude of the drive voltage between the upper and lowerlimits thereby driving the ultrasonic wave motor in stable manner.

However, the conventional drive devices for the ultrasonic wave motorare still associated with a drawback that they cannot constantly providea high driving efficiency even when a stable drive state is obtained, aswill be explained in the following with reference to the attacheddrawings. FIG. 4 shows the drive current, drive speed and driveefficiency as a function of drive frequency, under a drive voltage of 25VRMS and a load torque of 900 g.cm, measured by the present inventor.From a lower frequency side, the drive current reaches a maximum at adrive frequency F0, then decreases to reach a minimum at a drivefrequency F4, and gradually increases again at the higher frequencyside. On the other hand, the drive speed is highest at a frequency F1,and decreases both at the higher or lower drive frequency sides. Thefrequency region usually used for driving the ultrasonic wave motor isat the higher frequency side of said frequency F1. The drive efficiencyis highest in the vicinity of the drive frequency F4 where the drivecurrent is lowest. As will be understood from these facts, the driveefficiency becomes highest in the vicinity of the frequency F4 within afrequency region higher than the frequency F1, and the conventionaldrive devices are unable to constantly provide the high drive efficiencysince they are not designed to control the drive frequency at thehighest efficiency.

Therefore, a second aspect of the present invention, to be explainedlater, is to provide a driving device for the ultrasonic wave motor,capable of improving the drive efficiency thereof.

SUMMARY OF THE INVENTION

At first there will be explained a first embodiment of the presentinvention, which is applicable to a driving device for an ultrasonicwave motor consisting of a stator for generating a travelling vibrationwave in an elastic member by the oscillation of a piezoelectric member,and a rotor maintained in pressure contact with the stator bypressurizing means and adapted to be driven by said travelling vibrationwave, and particularly to a driving device for achieving the drivecontrol by a variable drive voltage.

The aforementioned object can be attained by the magnitude of the use oflower limit detecting means for detecting that the drive voltage hasreached the lower limit, and first drive voltage limiting means adapted,in response to the detection of the drive voltage at the lower limit bysaid lower limit detecting means, for maintaining the drive voltage atsaid lower limit or increasing the drive voltage. There may be furtherprovided upper limit detecting means for detecting that the drivevoltage magnitude has reached the upper limit, and second drive voltagelimiting means adapted, in response to the detection of the drivevoltage at the upper limit by said upper limit detecting means, formaintaining the drive voltage at said upper limit or decreasing thedrive voltage.

The present invention is also applicable to a driving device forachieving the drive control by a variable drive frequency.

In this case the aforementioned object can be attained by the use oflower limit detecting means for detecting that the magnitude of thedrive voltage of the ultrasonic wave motor has reached a lower limit,and third drive voltage limiting means adapted, in response to thedetection of the drive voltage at said lower limit by said lower limitdetecting means, for controlling the drive frequency so as to maintainthe drive voltage at said lower limit or to increase the drive voltage.There may be further provided upper limit detecting means for detectingthat the drive voltage magnitude has reached an upper limit, and fourthdrive voltage limiting means adapted, in response to the detection ofthe drive voltage at said upper limit by said upper limit detectingmeans, for controlling the drive frequency so as to maintain the drivevoltage at said upper limit or to decrease said drive voltage.

In the following there will be explained the function of theabove-explained driving device for the ultrasonic wave motor.

In case of voltage control of the motor, if the lower limit detectingmeans detects that the drive voltage is at the lower limit, the firstdrive voltage limiting means either maintains the drive voltage at saidlower limit or increases the drive voltage. If the upper limit detectingmeans detects that the drive voltage is at the upper limit, the seconddrive voltage limiting means either maintains the drive voltage at saidupper limit or decreases the drive voltage.

In case of frequency control of the motor, if the lower limit detectingmeans detects that the drive voltage is at the lower limit, the thirddrive voltage limiting means controls the drive frequency so as tomaintain the drive voltage at said lower limit or to increase the drivevoltage, thereby limiting the drive voltage. Also if the upper limitdetecting means detects that the drive voltage is at the upper limit,the fourth drive voltage limiting means controls the drive frequency soas to maintain the drive voltage at said upper limit or to decrease thedrive voltage, thereby limiting the drive voltage.

In this manner the drive voltage is controlled between the upper andlower limits, thereby driving the ultrasonic wave motor in stablemanner.

In the following there will be explained a second embodiment of thepresent invention. In said second embodiment, the driving device of thepresent invention for the ultrasonic wave motor is so constructed thatthe drive state of the ultrasonic wave motor is constantly detected bydrive state detecting means, and drive frequency setting means sets thedrive frequency for the motor at a value maximizing the driveefficiency, or drive voltage setting means sets the drive voltage forthe motor at a value maximizing the drive efficiency. Thus, in thesecond embodiment of the present invention, there is provided a drivingdevice for an ultrasonic wave motor utilizing ultrasonic vibration andincluding an elastic member and a piezo electric member with at least apair of input electrodes for oscillating said elastic member, thedriving device comprising

drive frequency setting means for setting the drive frequency for saidultrasonic wave motor;

phase shifting means for releasing cyclic signals with a mutual phasedifference, based on the output of said drive frequency setting means;

drive voltage setting means for setting the cyclic signals, releasedfrom said phase shifting means, at a voltage required to drive saidultrasonic wave motor; and

drive state detecting means for detecting the drive state of saidultrasonic wave motor and sending an output to said drive frequencysetting means,

wherein said drive frequency setting means is adapted to set the drivefrequency for said ultrasonic wave motor at a value maximizing the driveefficiency of said motor with respect to said voltage, based on theoutput of said drive state detecting means. There is also provided adriving device for an ultrasonic wave motor utilizing ultrasonicvibration and including an elastic member and a piezo-electric memberwith at least a pair of input electrodes for oscillatingsaid elasticmember, the driving device comprising;

drive frequency setting means for setting the drive frequency for saidultrasonic wave motor;

phase shifting means for releasing cyclic signals with a mutual phasedifference, based on the output of said drive frequency setting means;

drive voltage setting means for setting the cyclic signals, releasedfrom said phase shifting means, at a voltage required to drive saidultrasonic wave motor; and

drive state detecting means for detecting the drive state of saidultrasonic wave motor and sending an output to said drive voltagesetting means;

wherein said drive voltage setting means is adapted to set the drivevoltage for said ultrasonic wave motor at a value maximizing the driveefficiency of said motor with respect to said cyclic signals, based onthe output of said drive state detecting means.

As explained in the foregoing, it is clarified from the experiment ofthe present inventor that the ultrasonic wave motor can be constantlydriven with a high efficiency by maintaining the drive frequency at avalue F4 shown in FIG. 4. At said drive frequency the magnitude of thedrive current becomes minimum and the drive efficiency becomes maximum.FIG. 5 is an equivalent circuit diagram of the ultrasonic wave motor,wherein C0 is the self capacitance of the motor, and a serial resonancecircuit is composed of L, C and R. When the ultrasonic wave motor is inthe resonance state, said serial resonance circuit is considered also ina resonance state, and, in such case the impedance becomes minimum andthe current flowing into said equivalent circuit becomes maximum asalready known. Also as already known, such serial resonance circuit hasan antiresonance frequency, and, with an input of such antiresonancefrequency, the impedance becomes maximum and the flow-in current becomesminimum. Based on these facts, the aforementioned drive frequency F0 isconsidered as the resonance frequency of the ultrasonic wave motor, andthe drive frequency F4 is considered as the antiresonance frequency ofsaid motor because the drive current becomes minimum. Consequently, ahigh-efficiency drive of the ultrasonic wave motor can be achieved bymaintaining the drive frequency therefor at the antiresonance frequencyspecific to said motor. The antiresonance frequency means a frequencyproviding a minimum drive current at the currently used drive voltage.

As explained above, constantly efficient drive of the ultrasonic wavemotor can be achieved by constantly matching the drive frequency of themotor with said antiresonance frequency. Even if complete matching isdifficult to achieve, a considerably high drive efficiency can beobtained for example by setting the drive frequency in a frequency rangeC in the vicinity of the antiresonance frequency as shown in FIG. 4.Said range C may be so selected that the drive frequency is at leastequal to 0.8× the maximum efficiency.

Instead of setting the drive frequency at a single value, it isnaturally possible to set the drive frequency in a range correspondingto said range C including the antiresonance frequency F4.

Also the experiments of the present inventor have confirmed that thedrive frequency F4 providing the minimum drive current and the maximumdrive efficiency varies with a change in the drive voltage. FIG. 6 is achart showing the relationship between the drive speed and the drivefrequency when the drive voltage is changed from 15 to 35 VRMS,indicating that the drive speed becomes higher with the increase in thedrive voltage. FIG. 7 is a chart indicating the change in the resonancefrequency F0 and the antiresonance frequency F4 at the drive voltagesshown in FIG. 6. The drive frequency F4 providing the minimum drivecurrent and the maximum drive efficiency moves to a lower frequency withthe increase in the drive voltage, while the drive frequency F0providing the maximum drive current is little affected by the drivevoltage, so that the difference between the frequencies F4 and F0decreases with the increase in the drive voltage. This phenomenon is notclearly explained at present, but is presumed to be based on a change inthe resonance characteristics of the motor depending on the drivevoltage. Also the reason why the maximum drive speed is not obtained atthe drive frequency where the drive current becomes maximum is not yetclarified, but is presumably based on the unstable operation of theelastic vibrating member in the vicinity of the resonance frequency andon fluctuations in performance and errors in positions of the twodriving electrodes of the piezoelectric member. FIG. 8 shows the drivespeed at the drive frequency F4, at different drive voltages shown inFIG. 6. As will be apparent from FIG. 7, a constantly high driveefficiency cannot be obtained with a constant drive frequency if thedrive voltage varies. It is however possible to drive the ultrasonicwave motor in stable manner and to constantly obtain a high driveefficiency, by setting the drive frequency at the antiresonancefrequency F4 corresponding to the current drive voltage.

Based on the foregoing facts, a driving method for the ultrasonic wavemotor with variable drive voltage and with drive frequency selected atthe antiresonance frequency corresponding to said drive voltage willenable arbitrarily regulating the drive speed and constantly achieving ahigh drive efficiency at the arbitrarily regulated drive speed.

It is also possible to regulate the drive speed by a change in the drivefrequency and to constantly obtain a high drive efficiency bycontrolling the drive voltage in such a manner that said drive frequencycorresponds to the antiresonance frequency.

In the following there will be explained methods for constantlymaintaining the drive frequency at the antiresonance frequency F4.

A first method is based on the control of the drive frequency, accordingto the phase difference φm between the drive voltage of the ultrasonicwave motor and the output voltage of the monitor electrode 100-4d. Thiswill be explained with reference to FIG. 9, showing the drive speed andsaid phase difference φm as a function of the drive frequency, under adrive voltage and a load torque same as in FIG. 4. A curve φm1corresponds to a case in which the input voltage to the electrode 100-4ashown in FIG. 2 is advanced by 90° in comparison with that to theelectrode 100-4b, and indicates the phase difference between the drivevoltage to said input electrode 100-4a and the output voltage of saidmonitor electrode. A curve φm2 corresponds to a case in which the inputvoltage to the electrode 100-4b is advanced by 90° in comparison withthat to the electrode 100-4a, with an opposite driving direction. Theantiresonance frequency F4 is where the drive efficiency becomesmaximum, and φm11 and φm21 indicate phase differences at said frequencyF4. From this chart it will be understood that the drive frequency canbe matched with the antiresonance frequency, by controlling the drivefrequency so as to satisfy a condition φm1=φm11 or φm2=φm21. FIG. 10shows the phase difference φm at the antiresonance frequency, atdifferent drive voltages. It will be understood that the phasedifference φm between the drive voltage at the antiresonance frequenceand the output voltage of the monitor electrode substantially remainsconstant at φm11 or φm21 in spite of the change in drive voltage. It istherefore possible to maintain the drive frequency at the antiresonancefrequency constantly by controlling the drive frequency so as to satisfythe condition φm1=φm11 or φm2=φm21, thereby achieving a high efficiencyin the drive of the ultrasonic wave motor.

A 2nd method is to control the drive frequency at the antiresonancefrequency, based on the output voltage VM of said monitor electrode.FIG. 11 shows the drive speed and said output voltage VM of the monitorelectrode as a function of the drive frequency of the ultrasonic wavemotor, under a drive voltage and a load torque same as in FIG. 4 or inthe 1st method explained above. Said output voltage VM varies accordingto the drive frequency, and assumes a value VMN at the antiresonancefrequence F4. Thus the drive frequency can be matched with theantiresonance frequency by controlling the drive frequency so as tosatisfy a condition VM=VMN. However, as the condition VM=VMN may besatisfied at a drive frequency lower than the frequency providing themaximum speed of the motor, said condition VM=VMN is to be satisfied ata drive frequency at least higher than the drive frequency F1 where thedrive speed becomes maximum. FIG. 12 shows the change of VMN as afunction of the drive voltage. By establishing the relationship betweenthe drive voltage and VMN beforehand, the ultrasonic wave motor can beconstantly driven with the antiresonance frequency even in the presenceof variation in the drive voltage, by controlling the drive frequency insuch a manner that VM corresponds to said drive voltage, and a highdrive efficiency can therefore be assured.

A 3rd method is, in case of providing the motor with the driving powerthrough inductive elements connected to the input electrodes 100-4a,100-4b as shown in FIG. 13, to match the drive frequency with theantiresonance frequency by detecting the phase difference φv in thevoltage across said inductive element. FIG. 14 shows an example ofbehavior of the drive speed and said φv as a function of the drivefrequency, under a drive voltage and a load torque same as in FIG. 4.However, as the drive voltage VI supplied to the input electrode is notconstant even if the voltage VL applied to said inductive element ismade constant as will be explained later, said voltage VL applied to theinductive element is made a square wave of 15 V peak-to-peak, and theload torque is selected as 900 g.cm as in the case of FIG. 4. Saidinductive element has to be selected according to each ultrasonic wavemotor. In the present case, the inductance is experimentally determinedas 3.9 mH. As shown in FIG. 14, said phase difference φv assumes a valueφv1 at the antiresonance frequency F4. Consequently the drive frequencymay be so controlled as to satisfy a condition φv=φv1. However, sincesaid condition φv=φv1 is again satisfied in the lower frequency regionthan F4, the drive frequency is preferably maintained not lower than thefrequency providing the maximum phase difference. Also said VI variesdepending on the VL. FIG. 15 shows the change in the phase differenceφv1 at the antiresonance frequency, as a function of VL. Though notparticularly illustrated, the antiresonance frequency F4 variesdepending on VL in a similar manner as shown in FIG. 7 and moves to alower or higher frequency as the VL becomes higher or lower. FIG. 15indicates that the phase difference φv between voltages across saidinductive element at the antiresonance frequence substantially remainsat φv1 regardless of the change in VL. Consequently the drive frequencyfor the ultrasonic wave motor can be constantly maintained at theantiresonance frequency, thus achieving a high drive efficiency, by acontrol of the drive frequency so as to satisfy a condition in phasedifference φv=φv1.

In a 4th method, as in the 3rd method, the driving power is supplied totwo input electrodes of the ultrasonic wave motor through inductiveelements. In such case it is experimentally found that the voltage VI ofthe drive voltage signals supplied to said input electrodes variesdepending on the drive frequency, even if the voltage VL of the voltagesignals applied to said inductive elements is maintained constant. Thisphenomenon is considered due to a change in the impedance of theultrasonic wave motor. When it is driven at the antiresonance frequency,the motor shows maximum impedance as explained before, so that the drivecurrent flowing into said input electrodes becomes minimum. Consequentlythe currents in said inductive elements are likewise minimum, showingminimum voltage drops therein. FIG. 16 shows an example of the behaviorof the drive speed and said VI as a function of the drive frequency,with a voltage VL applied to said inductive elements and a load torquethe same as in the 3rd method and with an inductance of 2 mH in saidinductive element. Said voltage VI assumes a minimum value VIL at theantiresonance frequency F4. Also FIG. 17 shows the change in said VIL asa function of the voltage applied to said inductive element. Said valueVIL varies depending on the voltage applied to the inductive element.Therefore, by establishing the relationship between VIL and the voltageapplied to said inductive element in advance, there can be realized asituation VI=VIL, namely the drive frequency can be matched with theantiresonance frequency, through the control of the drive frequency.

A 5th method is to control the drive frequency at the antiresonancefrequency, based on a phase difference φi between the drive voltagessupplied to said two input electrodes and the drive currents flowinginto said input electrodes, because said φi varies depending on thedrive frequency as shown in FIG. 18. Said φi assumes a value φiN at theantiresonance drive frequency F4. Also FIG. 19 shows the variation ofφiN at various drive voltages. The φiN remains substantially constantregardless of the change in the drive voltage. Therefore, the drivefrequency for the ultrasonic wave motor can be constantly maintained atthe antiresonance frequency by a control of the drive frequency so as tosatisfy a condition φi=φiN.

The above-mentioned methods allow maintaining the drive frequency of theultrasonic wave motor at the antiresonance frequency, thereby constantlyrealizing a high drive efficiency in the ultrasonic wave motor.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an ultrasonic wave motor;

FIG. 2 is a view showing arrangement of electrodes in the piezoelectricmember of an ultrasonic wave motor;

FIG. 3 is a chart showing the relationship between the drive speed andthe drive frequency of an ultrasonic wave motor;

FIG. 4 is a chart showing an example of relationship among the drivespeed, drive efficiency, drive current and drive frequency of anultrasonic wave motor;

FIG. 5 is an equivalent circuit diagram of an ultrasonic wave motor;

FIG. 6 is a chart showing an example of relationship between the drivespeed and the drive frequency at different drive voltages;

FIG. 7 is a chart showing the resonance and antiresonance frequencies ofan ultrasonic wave motor as a function of the drive voltage;

FIG. 8 is a chart showing the change of the drive speed at theantiresonance frequency as a function of the drive voltage;

FIG. 9 is a chart showing the drive speed, and the phase differencebetween the drive voltage and the output voltage of a monitor electrode,as a function of the drive frequency;

FIG. 10 is a chart showing the phase difference between the drivevoltage and the output voltage of a monitor electrode, at theantiresonance frequency, as a function of the drive voltage;

FIG. 11 is a chart showing the drive speed and the output voltage of themonitor electrode as a function of the drive frequency;

FIG. 12 is a chart showing the output voltage of the monitor electrodeat the antiresonance frequency, as a function of the drive voltage;

FIG. 13 is a view showing inductive elements connected to the inputelectrodes of the piezoelectric member constituting an ultrasonic wavemotor;

FIG. 14 is a chart showing an example of the drive speed and the phasedifference between the voltages across an inductive element, as afunction of the drive frequency;

FIG. 15 is a chart showing the phase difference between the voltagesacross the inductive element at the antiresonance frequency, as afunction of the voltage applied to said inductive element;

FIG. 16 is a chart showing an example of the drive speed and the voltageapplied to the input electrode of the ultrasonic wave motor as afunction of the drive frequency, when the driving power is suppliedthrough inductive elements;

FIG. 17 is a chart showing the applied voltage shown in FIG. 16, as afunction of the voltage applied to the inductive element at theantiresonance frequency;

FIG. 18 is a chart showing the drive speed and the phase differencebetween the drive voltage and the current flowing into the inputelectrode as a function of the drive frequency;

FIG. 19 is a chart showing the phase difference between the drivevoltage and the flowing current as a function of the drive voltage atthe antiresonance frequency;

FIG. 20 is a chart showing the relationship between the drive speed andthe monitor electrode voltage;

FIG. 21 iS a chart showing the relationship between the drive speed andthe drive frequency at different drive voltages;

FIG. 22 is a chart showing the relationship between the monitorelectrode voltage and the drive frequency at different drive voltages;

FIG. 23 is a chart showing the relationship between the drive speed andthe drive voltage;

FIG. 24 is a circuit diagram of a first example;

FIG. 25 is a table showing the relationship between the signal input andcontrol input of a multiplexer MPX;

FIG. 26 is a circuit diagram of a second example;

FIG. 27 is a circuit diagram of a third example;

FIG. 28 is a circuit diagram of a 4th example;

FIG. 29 is a schematic block diagram of a 5th example;

FIG. 30 is a circuit diagram of the 5th example;

FIG. 31 is a circuit diagram of an example of a phase/frequencycomparator;

FIG. 32 is a chart showing the function of the phase/frequencycomparator;

FIG. 33 is a chart showing the relationship between the input voltageand output frequency of a voltage-controlled oscillator;

FIG. 34 is a timing chart showing the function of a shift register;

FIG. 35 is a timing chart showing the function of an example shown inFIG. 30;

FIG. 36 is a partial circuit diagram of a modification of the 5thexample;

FIG. 37 is a circuit diagram showing an example of a variable outputpower source;

FIG. 38 is a circuit diagram of an example of drive voltage settingmeans;

FIG. 39 is a timing chart showing the function of the circuit shown inFIG. 38;

FIG. 40 is a circuit diagram of a 6th example;

FIG. 41 is a chart showing the relationship between the output voltageof variable power source and the output voltage of the monitor electrodeat the antiresonance frequency in the 6th example;

FIG. 42 is a circuit diagram of a 7th example;

FIG. 43 is a circuit diagram of an 8th example;

FIG. 44 is a circuit diagram of a 9th example; and

FIGS. 45 and 46 are diagrams of a 10th example.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [Examples of 1stembodiment of the present invention]

In the following there will be explained examples of a first embodimentof the present invention. At first there will be explained, based on theexperimental results of the present inventor, a method of determiningthe upper and lower limits of the drive voltage for stably driving theultrasonic wave motor.

The output voltage VM of the monitor electrode is related with theamplitude of the travelling vibration wave generated in the elasticmember, and increases or decreases respectively as said amplitudeincreases or decreases.

When the relationship between the drive speed and the drive frequency isinvestigated with the drive voltage varying at the high voltage side,there result unstable drive state and abnormal noises as described inthe Related Background Art when the monitor electrode voltage VM reachesa substantially constant upper limit VM1. On the other hand, in asimilar investigation with the drive voltage varying in the lowervoltage side, there result unsmooth motor operation and eventual motorstoppage when the monitor electrode voltage VM reaches a substantiallyconstant lower limit VM2 (cf. FIG. 20). The drive speed--drive frequencycharacteristics and the monitor electrode voltage--drive frequencycharacteristics at different drive voltages are respectively shown inFIGS. 21 and 22. The curves 1, 2 and 3 are obtained with drive voltagesincreased in this order, wherein the curve 2 corresponds to theaforementioned characteristics shown in FIG. 3. As shown in thesedrawings, the aforementioned frequencies F2, F3 respectively move toF2H, F3H and the region b moves to a region bH when the drive voltage ismade lower. On the other hand, when the drive voltage is shifted higher,these respectively move to F2L, F3L and a region bL.

As the drive voltage substantially reaches the upper or lower limitrespectively when the monitor electrode voltage VM is at VM1 or VM2, asexplained above, a control to maintain a condition VM2≦VM≦VM1 underdetection of the monitor electrode voltage allows to limit the drivevoltage between the upper and lower limits, thereby driving theultrasonic wave motor in stable manner. This drive control method forthe ultrasonic wave motor will be explained later in the 1st example.

Then, in case transformers or coils are connected to the inputelectrodes, the upper and lower limits of the drive voltage can bedetermined as shown in FIG. 23 by investigating the relationship betweenthe drive state of the motor and the drive voltage in advance, and thedrive voltage can be controlled between said upper and lower limits torealize stable drive control of the ultrasonic wave motor. Such drivecontrol method will be explained in the 2nd example.

In case the motor is driven with a constant drive frequency, the drivevoltage providing stable drive state at said drive frequency isdetermined from FIGS. 21, 22 and 23. In case the motor is driven with avariable drive frequency within a limited range, the drive voltageproviding stable drive state within such range is determined from FIGS.21, 22 and 23. Such drive control method for the ultrasonic wave motorwill be explained in the 3rd example.

[1st example]

FIG. 24 is a circuit diagram of the 1st example.

A voltage detecting circuit 1 is composed of a diode 11, a resistor 12and a capacitor 13, and, being connected at the input terminal thereofto the monitor electrode, converts the AC output VM of said monitorelectrode into a DC voltage V0.

An upper limit detecting circuit 2 is composed of a voltage comparator21 and a variable resistor 22, and the (+) and (-) input terminals ofthe voltage comparator 21 are respectively connected to the output ofthe variable resistor 22 and the output of the voltage detectingcircuit 1. The variable resistor 22 is connected between a power supplyand the ground, and the output thereof is set equal to the outputvoltage V01 of the voltage detecting circuit 1 when the monitor voltageVM is equal to VM1. Consequently the upper limit detecting circuit 2releases a high-level output when the output V0 of the voltage detectingcircuit 1 satisfies a condition V0>V01, namely the monitor voltage VMmeets a condition VM>VM1, but a low-level output when V0≦V01 or VM≦VM1.

A lower limit detecting circuit 3 is composed of a voltage comparator 31and a variable resistor 32, and the (+) and (-) input terminals of thevoltage comparator 31 are respectively connected to the output of thevoltage detecting circuit 1 and the output of the variable resistor 32.The variable resistor 32 is connected between the power supply and theground, and the output thereof is set equal to the output voltage V02 ofthe voltage detecting circuit 1 when the monitor voltage VM is equal toVM2. Consequently the lower limit detecting circuit 3 releases alow-level output when the output V0 of the voltage detecting circuit 1satisfies a condition V0<V02, namely when the monitor voltage VM meets acondition VM<VM2, or a high-level output when V0≧V02 or VM≧VM2.

A drive voltage setting circuit 4 is composed of a multiplexer (MPX) 41,resistors 42, 44, variable resistors 43, 45, a capacitor 46 and avariable output power supply 47. The multiplexer 41 switches signalinputs A, B, C and D according to the signal levels entered into controlinputs X, Y and Z as shown in FIG. 25. Said control input terminals X,Y, Z are respectively connected to the output of the upper limitdetecting circuit 2, output of the lower limit detecting circuit 3 and astart input signal. The resistor 42 is connected between the powersupply and the input terminal A of the multiplexer 41 and serves to setthe lower limit of the drive voltage. The variable resistor 43 isconnected between the power supply and the ground and has an outputconnected to the input terminal B of the multiplexer 41, thereby varyingthe drive voltage according to the voltage set therein. The resistor 44is connected between the input terminal C of the multiplexer 41 and theground and serves to set the upper limit of the drive voltage. Thevariable resistor 45 is connected between the power supply and theground and has an output connected to the input terminal D of themultiplexer 41, thereby setting the drive voltage at the start of theultrasonic wave motor. The capacitor 46 is connected, at a terminalthereof, to the output of the multiplexer 41 and the input to thevariable output power supply 47 and is grounded at the other terminal,and holds the output voltage of the multiplexer 41. The variable outputpower supply 47 releases a DC voltage proportional to the input signallevel.

A drive frequency setting circuit 5 is a known oscillator generating acyclic signal, and its output frequency is set within a region b, shownin FIG. 3, where the ultrasonic wave motor can function stably. Theoutput of said circuit 5 is supplied to a phase shifting circuit 6,which generates two cyclic signals of a mutual phase difference of π/2.A power amplifier 7 amplifies two cyclic signals supplied from the phaseshifting circuit 6 to the voltage supplied from the variable outputpower supply 47, and applies said cyclic signals to start electrodes100-4a, 100-4b of the ultrasonic wave motor only when the start inputsignal is at a high-level state.

In the following there will be explained the function of the 1stexample.

When the start input signal is at the low-level state, the multiplexer41 selects the input D as shown in FIG. 25, whereby the variable outputpower supply 47 supplies the power amplifier 7 with a drive voltage atthe start of the ultrasonic wave motor set by the variable resistor 45.

When the start input signal is shifted to the high-level state forstarting the motor, the cyclic drive signals generated by the drivefrequency setting circuit 5 and subjected to a mutual phase shift of π/2by the phase shifting circuit 6 are amplified to the above-mentionedstart voltage by the power amplifier 7 and supplied to the ultrasonicwave motor. Thus the motor is started by the starting drive voltage setby the variable resistor 45.

When the ultrasonic wave motor is started, the monitor electrode 100-4dgenerates a monitor voltage VM, which is fed back to the voltagedetecting circuit 1, converted into a DC voltage V0 therein and suppliedto the upper and lower limit detecting circuits 2, 3. If said DC voltageV0 satisfies a relation V02≦V0≦V01, namely if the monitor voltage VMsatisfies a condition VM2≦VM≦VM1, said detecting circuits 2, 3 bothrelease high-level output signals, whereby the multiplexer 41 selectsthe input B as shown in FIG. 25. Consequently the drive voltage for theultrasonic wave motor is determined by the voltage set by the variableresistor 43, and the drive speed of the motor can be regulated byvarying said set voltage.

Then, when the variable resistor 43 is shifted to a higher voltage, thedrive voltage increases accordingly. When the drive voltage reaches theupper limit, the output voltage V0 of the voltage detecting circuit 1becomes larger than V01, namely the monitor voltage VM becomes largerthan VM1, so that the upper limit detecting circuit 2 releases alow-level output signal and the multiplexer 41 selects the input C asshown in FIG. 25. Consequently the potential of the capacitor 46, whichis charged to the voltage of the input B, which is set by the variableresistor 43 and has been selected up to immediately before, is graduallylowered by discharge through the resistor 44, and the output voltage ofthe variable output power supply 47 decreases accordingly, thus reducingthe drive voltage for the motor. When the monitor voltage VM isaccordingly lowered to satisfy a condition VM≦VM1, the output voltage V0of the voltage detecting circuit 1 satisfies a condition V0≦V01, wherebythe upper limit detecting circuit 2 again releases a high-level outputsignal. Consequently the multiplexer 41 selects the input B, or thevoltage set by the variable resistor 43, whereby the drive voltage isagain elevated.

The voltage detecting circuit 1, the upper limit detecting circuit 2 andthe drive voltage setting circuit 4 maintain the monitor voltage VM soas to satisfy a condition VM≦VM1 by repeating the above-explainedoperation, so that the drive voltage does not exceed the upper limit andthe ultrasonic wave motor is stably driven.

Then, when the variable resistor 43 is shifted to a lower voltage, thedrive voltage decreases accordingly. When the drive voltage reaches thelower limit, the output voltage V0 of the voltage detecting circuit 1becomes smaller than V02, namely the monitor voltage VM becomes smallerthan VM2, so that the lower limit detecting circuit 3 releases alow-level output signal and the multiplexer 41 selects the input A asshown in FIG. 25. Consequently the potential of the capacitor 46, whichis charged to the voltage of the input B, which is set by the variableresistor 43 and has been selected up to immediately before, is graduallyelevated by charging by the power supply through the resistor 42, thuselevating the drive voltage for the motor. When the monitor voltage VMis accordingly elevated to satisfy a condition Vm≧VM2, the outputvoltage V0 of the voltage detecting circuit 1 satisfies a conditionV01≧V02, whereby the lower limit detecting circuit 3 again releases ahigh-level output signal. Consequently the multiplexer 41 selects theinput B, whereby the drive voltage is again lowered.

The voltage detecting circuit 1, the lower limit detecting circuit 3 andthe drive voltage setting circuit 4 maintain the monitor voltage VM soas to satisfy a condition VM≧VM2 by repeating the above-explainedoperation, so that the drive voltage does not become smaller than thelower limit and the ultrasonic wave motor is stably driven.

As explained in the foregoing, the control based on the detected monitorvoltage VM so as to satisfy a condition VM2≦VM≦VM1 allows limiting thedrive voltage between the upper and lower limits, thereby realizingstable drive of the ultrasonic wave motor.

In the above-explained 1st example, in case the monitor voltage VMbecomes larger than VM1 or smaller than VM2, the input of themultiplexer 41 is switched to charge or discharge the capacitor 46,thereby varying the output voltage of the variable output power supply47 and thus controlling the drive voltage for the ultrasonic wave motor,but it is also possible to intercept the output of the multiplexer 41,thereby retaining the immediately preceding voltage by said capacitor46. In such case the output of the multiplexer 41 is connected againwhen a condition VM2≦VM≦VM1 is restored.

[2nd example ]

FIG. 26 is a circuit diagram of a 2nd example, which is same as the 1stexample except that the input terminal of the voltage detecting circuit1 is connected to the drive electrode 100-4a instead of the monitorelectrode 100-4d and that the output of the power amplifier 7 isconnected to the drive electrodes 100-4a , 100-4b through coils 8, andsuch same portions will not be explained further.

In case of driving power supply to the drive electrodes 100-4a, 100-4bthrough coils, the drive voltage varies depending on the drive frequencyeven if the output voltage of the power amplifier 7 is maintainedconstant, as explained before. In such case, the control can be made asin the 1st example, by detecting the drive voltage from the driveelectrode 100-4a as shown in FIG. 26 and feeding it back to the voltagedetecting circuit 1.

The settings of the variable resistors 22, 32 and the resistances of theresistors 42, 44 for respectively determining the upper and lower limitsof the drive voltage can be suitably selected in experimental manner.

In this 2nd example, the drive voltage is directly fed back to thevoltage detecting circuit 1 for detecting the upper and lower limits,and is lowered or elevated respectively when the upper or lower limit isreached, Consequently the drive voltage is constantly controlled betweenthe upper and lower limits, and the ultrasonic wave motor can be drivenin stable manner (cf. FIG. 23 ).

[3rd example ]

FIG. 27 is a circuit diagram of a 3rd example, wherein same componentsas those in the 1st example are represented by same symbols and will notbe explained further.

A drive frequency setting circuit 5A is composed of a multiplexer 51,resistors 52, 54, variable resistors 53, 55, a capacitor 56 and avoltage-controlled oscillator (VC0) 57. The multiplexer 51 isconstructed same as the multiplexer 41 in the 1st example, and, as shownin FIG. 25, switches the signal inputs A, B, C and D according to thesignal levels supplied to the control inputs X, Y and Z. The resistors52, connected between the input A of the multiplexer 51 and the ground,sets a drive frequency for maintaining the drive voltage for the motorat the lower limit or elevating said drive voltage. The variableresistor 53 is connected between the power supply and the ground, andhas an output connected to the input B of the multiplexer 51, therebyvarying the drive frequency according to the set voltage. The resistor54, connected between the power supply and the input C of themultiplexer 51, sets a drive frequency for maintaining the drive voltagefor the motor at the upper limit or decreasing said drive voltage. Thevariable resistor 55 is connected between the power supply and theground, and has an output connected to the input D of the multiplexer51, thereby varying the drive frequency at the start of the ultrasonicwave motor. The capacitor 56 is connected, at a terminal thereof, to theoutput of the multiplexer 51 and the input of the voltage-controlledoscillator 57, and, at the other terminal, to the ground, and retainsthe output of the multiplexer 51. The voltage-controlled oscillator 57generates a cyclic signal of a frequency proportional to the inputvoltage. The power amplifier 7 amplifies the cyclic output signals ofthe phase shifting circuit 6 to a constant drive voltage, and appliesthus amplified signals to the drive electrodes 100-4a, 100-4b only whenthe start input signal is at the low level state.

Also if the relationship between the output voltage of the variableoutput power supply and the drive voltage or the monitor voltage isexperimentally investigated in advance, there may be detected the outputvoltage of the variable output power supply instead of the drive voltageor the monitor voltage.

In the following is explained the function of the 3rd example.

When the start input signal is at the low-level state, the multiplexer51 selects the input E as shown in FIG. 25, whereby thevoltage-controlled oscillator 57 supplies the phase shifting circuit 6with a cyclic signal for motor starting set by the variable resistor 55.In response the phase shifting circuit 6 generates two cyclic signals ofa mutual phase shift of π/2 and supplies said two signals to the poweramplifier 7. The variable resistor 55 is set at a stable drive frequencyin the region b shown in FIG. 3.

When the start input signal is shifted to the high-level state forstarting the motor, the power amplifier 7 amplifies the cyclic signalsfrom the phase shifting circuit 6 and applies the amplified signals tothe drive electrodes 100-4a, 100-4b. Thus the motor is started by thestarting drive voltage set by the variable resistor 55.

When the ultrasonic wave motor is started, the monitor electrode 100-4dgenerates a monitor voltage VM, which is fed back to the voltagedetecting circuit 1, converted into a DC voltage V0 therein and suppliedto the upper and lower limit detecting circuits 2, 3. If said DC voltageV0 satisfies a relation V02≦V0≦V01, namely if the monitor voltage VMsatisfies a condition VM2≦VM≦VM1, said detecting circuits 2, 3 bothrelease high-level output signals, whereby the multiplexer 51 selectsthe input B as shown in FIG. 25. Consequently the drive frequency forthe ultrasonic wave motor is determined by the voltage set by thevariable resistor 53, and the drive speed of the motor can be regulatedby varying said set voltage.

Then, when the variable resistor 53 is shifted to a lower voltage, thedrive frequency decreases and the drive speed increases accordingly.Also the monitor voltage VM increases in proportion to the drive speed.When the monitor voltage VM exceeds VM1, namely when the output voltageV0 of the voltage detecting circuit 1 exceeds V01, the upper limitdetecting circuit 2 releases a low-level output signal, whereby themultiplexer 51 selects the input C as shown in FIG. 25. Consequently thepotential of the capacitor 56, charged to the voltage of the input Bselected immediately before, namely the voltage set by the variableresistor 53, is gradually elevated by charging from the power supplythrough the resistor 54, whereby the voltage-controlled oscillator 57accordingly increases the output frequency. Consequently the drivefrequency for the ultrasonic wave motor is increased and the drive speedthereof is reduced.

As the monitor voltage VM is lowered to a state VM≦VM1 by the reductionof the drive speed, the output voltage V0 of the voltage detectingcircuit 1 reaches a stateup V0≦V01, whereby the upper limit detectingcircuit 2 again releases a high-level output. Consequently themultiplexer 51 selects the input B, or the voltage set by the variableresistor 53, whereby the drive frequency is lowered and the drive speedof the motor is increased.

The voltage detecting circuit 1, the upper limit detecting circuit 2 andthe drive frequency setting circuit 5A maintain the monitor voltage VMin a state VM≦VM1 by repeating the above-explained procedure, so thatthe drive voltage does not exceed the upper limit.

When the variable resistor 53 is shifted to a higher voltage, the drivefrequency increases and the drive speed decreases accordingly. Also themonitor voltage VM decreases in proportion to the drive speed. When themonitor voltage VM reaches a state VM<VM2 or when the output voltage V0of the voltage detecting circuit 1 reaches a state V0<V02, the lowerlimit detecting circuit 3 releases a low-level output, whereby themultiplexer 51 selects the input A. Consequently the potential of thecapacitor 56, charged to the voltage of the input B selected immediatelybefore, namely voltage set by the variable resistor 53, is graduallylowered by discharge through the resistor 52, whereby thevoltage-controlled oscillator 57 accordingly decreases the outputfrequency. Consequently the drive frequency for the ultrasonic wavemotor is decreased and the drive speed thereof is increased.

As the monitor voltage VM is elevated to a state VM≧VM2 by the increaseof the drive speed, the output voltage V0 of the voltage detectingcircuit 1 reaches a state V0≧V02, whereby the lower limit detectingcircuit 3 again releases a high-level output. Thus the multiplexer 51selects the input B, or the voltage set by the variable resistor 53, andthe drive frequency increases while the drive speed decreases.

The voltage detecting circuit 1, the lower limit detecting circuit 3 andthe drive frequency setting circuit 5A control the monitor voltage VM soas to maintain a state VM≧VM2 by repeating the above-explainedprocedure, so that the drive voltage does not becomes smaller than thelower limit.

As explained in the foregoing, the drive frequency is controlled so asto maintain the drive voltage between the upper and lower limits, sothat the ultrasonic wave motor can be stably driven. [4th example]

The drive device of the present invention for the ultrasonic wave motoris also applicable in feedback speed control by detecting the speed ofthe rotor 100-1 of the ultrasonic wave motor. In such case, the variableresistor 43 of the 1st example shown in FIG. 24 is replaced by a pulsegenerator 130 and a speed setting circuit 9 shown in FIG. 28.

The pulse generator 130 is coupled with the rotor 100-1 of theultrasonic wave motor and generates pulses in response to the speed ofsaid rotor 100-1. The drive speed setting circuit 9 is composed of anF/V converter 91, a reference voltage supply 92, and an amplifier 93.The F/V converter 91 converts the pulse signal from the pulse generator130 into a voltage signal proportional to the frequency of said pulsesignal and constituting a speed feedback voltage signal, for supply tothe amplifier 93. The reference voltage supply 92 releases a constantvoltage, corresponding to the drive speed instruction for the ultrasonicwave motor. The amplifier 93 determines and amplifies the differencebetween the voltage signal from the F/V converter 91 and that from thereference voltage supply 92.

In the following is explained the function of the above-explainedcircuit.

When the monitor voltage VM is in a state VM2≦VM≦VM1, namely when thedrive voltage of the motor is between the upper and lower limits, themultiplexer 41 selects the input B. The pulse generator 130 sends apulse signal of a frequency corresponding to the drive speed of themotor to the F/V converter 91, which converts said pulse signal into avoltage signal, namely speed feedback voltage signal for supply to theamplifier 93. Said amplifier 93 calculates the error between the speedinstruction signal from the reference voltage supply 2 and theabove-mentioned speed feedback signal, and amplifies said error. Theamplified error signal is supplied through the multiplexer 41 to thevariable output power supply 47 whereby the drive voltage for theultrasonic wave motor is controlled in the same manner as in the 1stexample.

In case the monitor voltage VM is in a state VM>VM1 or VM<VM2, the drivevoltage for the ultrasonic wave motor is controlled between the upperand lower limits by the voltage detecting circuit 1, the upper limitdetecting circuit 2 and the lower limit detecting circuit 3 as in the1st example, whereby the motor is driven in stable manner.

In the foregoing examples, the upper limit detecting means isconstituted by the voltage detecting circuit 1 and the upper limitdetecting circuit 2; the lower limit detecting means by the voltagedetecting circuit 1 and the lower limit detecting circuit 3; the firstvoltage limiting means by the multiplexer 41, resistor 42, capacitor 46and variable output power supply 47; the second voltage limiting meansby the multiplexer 41, resistor 44, capacitor 46 and variable voltagepower supply 47; the third voltage limiting means by the multiplexer 51,resistor 52, capacitor 56 and voltage-controlled oscillator 57; and thefourth voltage limiting means by the multiplexer 51, resistor 54,capacitor 56 and voltage-controlled oscillator 57.

[Examples of the 2nd embodiment of the present invention]

In the following there will be explained examples of the 2nd embodimentof the present invention.

FIG. 29 schematically shows the structure of the 2nd embodiment of thepresent invention. In brief, the driving device for the ultrasonic wavemotor is constituted by drive state detecting means 10, drive frequencysetting means 20, phase shifting means 30, and drive voltage settingmeans 40. Said drive frequency setting means 20 releases a cyclicsignal, of which frequency is correlated with the drive frequency forthe ultrasonic wave motor and is controlled by the output of said drivedetecting means 10. Said phase shifting means 30 divides the frequencyof the output cyclic signal of said drive frequency setting means 20 andgenerates cyclic signals of a mutual phase difference of π/2, for supplyto said drive voltage setting means 40. Said setting means 40 amplifiesthe outputs of said phase shifting means 30 to a drive voltage requiredfor driving the ultrasonic wave motor, and renders said drive voltagevariable, thereby varying the drive speed of the motor. Said drive statedetecting means 10 detects whether the motor is driven in theantiresonance state, and controls said drive frequency setting means inthe manner explained before, so as to maintain the motor constantly in astate driven at the antiresonance frequency. Such detection whether theultrasonic wave motor is driven at the antiresonance frequency by thedrive state detecting means and control to constantly maintain the drivefrequency at the antiresonance frequency allow obtaining a constantlyhigh drive efficiency even when the drive speed is arbitrarily set by achange in the drive voltage.

[5th example]

FIG. 30 is a block diagram of a driving device constituting an exampleof the 2nd embodiment of the present invention and designed to maintainthe drive frequency at the antiresonance frequency of the ultrasonicwave motor according to the aforementioned phase difference φm betweenthe drive voltage for the motor and the output voltage of the monitorelectrode. A start input signal starts or stops the ultrasonic wavemotor respectively at a high- or low-level state. A direction inputsignal switches the driving direction of the motor, depending on a high-or low-level state, by inverting the phase difference relationship ofthe drive voltage supplied to the two input electrodes of the motor. Thedrive state detecting means is composed of a first phase-locked loopconsisting of a wave form shaper 101, a multiplexer 102 (MPX1), a phasecomparator 103 (φl), a resistor 104, a capacitor 105, avoltage-controlled oscillator 105 (VCO1) and a known shift resistorcomposed of 16 D-flip-flops 107-122; a wave form shaper 123; amultiplexer 124 (MPX2); another multiplexer 125 (MPX3); an oscillator126; and a phase comparator 127 (φ2). The drive frequency setting means20 is composed of a resistor 201, a capacitor 202, and avoltage-controlled oscillator 203 (VCO2). Frequency dividing/shiftingmeans 30 is composed of two D-flip-flops 301, 302, and an EXOR gate 303.The drive voltage setting means 40 is composed of a variable 401, avariable output power supply 402 of which output voltage is variedaccording to the output voltage of said variable resistor, and two poweramplifiers 403 receiving the output of said variable output powersupply. Said power amplifiers intercept the start input signal at thelow-level state but amplify said start input signal at the high-levelstate. Inductive elements 50 are provided respectively between the twoinput electrodes of the ultrasonic wave motor and said two poweramplifiers. Also in case the inductive elements 50 are provided betweenthe input electrodes and the power amplifiers 403 as shown in FIG. 30,if the output voltage VL of said power amplifiers is maintainedconstant, the drive speed or the phase differences φm1, φm2 between thedrive voltages and the output voltage of monitor electrode is correlatedwith the drive frequency as shown in FIG. 9, and said phase differenceat the antiresonance frequency becomes almost constant regardless of theoutput voltage of the power amplifier, as shown in FIG. 10. Also theantiresonance frequency F4 increases or decreases in response to anincrease or decrease of said output voltage VL, as shown in FIG. 7. Thefollowing explanation will be based on the relationship shown in FIGS. 9and 10.

It is now assumed that the start input signal is at the low-level stateand the direction input signal is at the high-level state. As the startinput signal is at the low-level state, the outputs of said poweramplifiers are turned off, so that the drive voltages are not suppliedto the input electrodes of the motor, which is therefore in the stoppedstate. Said MPX1, receiving the start input signal at the controlterminal CTL, selects an input A out of two inputs when said terminalCTL is at the low-level state. The inputs A and B are respectivelyconnected to the output Q of said D-flip-flop 302 and the output of saidwave form shaper 101. Thus the output Q of said D-flip-flop 302 issupplied to an input SIG of the phase comparator φ1, of which the otherinput COMP is connected to the input D of the D-flip-flop 107. Saidphase comparator φ1 is composed of a known phase frequency comparator(PFC), of which structure and function will be explained in thefollowing.

FIG. 31 is a circuit diagram showing an example of said phase frequencycomparator, composed of J-K flip-flops 128, 129, a NAND gate 131,inverters 132, 133, NOR gates 134, 135, an inverter 136 and MOStransistors 137, 138. The CP terminals of said two J-K flip-flopsconstitute the input terminals SIG, COMP. If the input signal to SIG isadvanced in phase in comparison with that to COMP, the MOS transistor136 is turned on during the phase difference to release the power supplyvoltage as the output. On the other hand, in case the input signal toCOMP is advanced in phase, the MOS transistor 137 is turned on duringthe phase difference to release 0 (V) as the output. Both input signalsare of a same phase, MOS transistors 136, 137 are both turned offwhereby the output is insulated. A resistor 104 and a capacitor 105constitute a low-pass filter, which integrated the output of theabove-explained phase comparator φ1 for supply to the voltage-controlledoscillator VCO1. FIG. 32 is a wave form chart showing theabove-explained function, wherein chain lines indicate that the outputof the phase frequency comparator is in the insulated state. Saidcomparator also functions by the difference in frequency of two inputsignals, and elevates or lowers the output voltage of said low-passfilter respectively the frequency of the input signal to SIG is higheror lower than that of the input signal to COMP.

The VCO1 is a known voltage-controlled oscillator releasing a cyclicsignal of which frequency is correlated with the input voltage as shownin FIG. 33. The output frequency increases or decreases respectively asthe input voltage becomes higher or lower. The output cyclic signal ofsaid voltage-controlled oscillator VCO1 is supplied to clock terminalsCK of the D-flip-flops 107-122 constituting a known shift register,which divides the frequency of said output cyclic signal into 1/(numberof D-flip-flops ×2), or 1/32 in this case. As a result, the firstphase-locked loop effects a feedback operation to bring the COMP inputcyclic signal equal to the SIG input cyclic signal in frequency and inphase. Thus the output frequency of the voltage-controlled oscillatorVCO1 becomes equal to 32 times of the SIG input frequency, of thecomparator φ1, or the output Q of the flip-flop 302. The output signalsQ and Q of the D-flip-flops constituting said shift register are of thesame frequency as that of the SIG input signal. The D input signal ofthe flip-flop 107 is of the same phase as that of said SIG input signal,and, as shown in FIG. 34, the output Q of said flip-flop 107 is delayedin phase by 360/32=11.25 (deg). The outputs Q of the subsequentflip-flops down to 122 are stepwise delayed by 11.25 (deg). Also theoutput Q of the flip-flop 107 ms different by 180 (deg), and thesubsequent output Q are stepwise delayed by 11.25 (deg).

The multiplexer MPX2 receives the direction input signal at the controlterminal CTL and selects the input A or B according to the drivingdirection of the ultrasonic wave motor. The multiplexer MPX3, composedof a known two-system multiplexer, receives the start input signal atthe control terminal CTL, the output of the oscillator 126 at the input1A, the output of the multiplexer MPX2 at the input 2B, the output Q ofthe D-flip-flop 302 at the input 2A, and the output of the wave formshaper at the input 2B. When said control terminal CTL is at thelow-level state, the inputs 1A and 2A are selected and released, so thatthe phase frequency comparator φ2, same as the aforementioned comparatorφ1, receives the output of the oscillator 126 and the output Q of theD-flip-flop 302 respectively at the SIG and COMP input terminals. Theoutput of the comparator φ2 is supplied to the voltage-controlledcomparator VCO2 through an integrator composed of a resistor 201 and acapacitor 202. Said voltage-controlled oscillator VCO2 is similar to theVCO1 but has a different output frequency region. The output cyclicsignal of said VCO2 is supplied to the clock terminal CK of a knownphase shifting divider composed of D-flip-flops 301, 302, whereby theoutputs Q, Q of said two D-flip-flops provide output signals of afrequency of 1/4 of that of output signal of the VCO2 and having mutualphase differences of 90 (deg). The output Q of the flip-flop 301 isadvanced by 90 (deg) in comparison with that of the flip-flop 302. Thusthe above-explained circuit constitutes a second phase-locked loop,functioning similarly to the aforementioned first phase-locked loop,thereby bringing the output Q of the D-flip-flop 302 same as the outputof the oscillator 126 in frequency and phase, so that the outputfrequency of the voltage-controlled oscillator VCO2 becomes 4 times ofthe frequency of the oscillator 126, and the outputs Q of the flip-flops301, 302 have the same frequency as that of said oscillator 126. Saidoscillator 126 serves to set the starting drive frequency of theultrasonic wave motor, and can be set at a suitable frequency capable ofstarting the motor. The output Q of the D-flip-flop 302 is supplied toone of the known power amplifiers 403, and the output Q of the flip-flop301 is connected to one of input ports of the EXOR gate 303, of whichthe other input port receives the direction input signal. Consequentlysaid EXOR gate 303 provides the other power amplifier 403 with aninverted signal of the output Q of the flip-flop 301 or said output Qrespectively when the direction input signal is in the high-level stateor in the low-level state, thereby switching the driving direction ofthe ultrasonic wave motor.

Said power amplifiers 403 intercept the outputs or amplify the inputsignals respectively when the start input signal is in the low-levelstate or in the high-level state. Said power amplifiers receive theoutput voltage of the known variable output power supply 402, of whichoutput voltage is varied by the variable resistor 401, so that theoutput voltages VL of said power amplifiers can be varied by varying theoutput voltage of the variable output power supply by means of saidvariable resistor. The outputs of the power amplifiers are supplied,respectively through the inductive elements 50, to the input electrodesof the ultrasonic wave motor, but, in the initial state where the startinput signal is at the low level state, the motor is not driven becauseof the absence of the drive voltages.

When the output voltage of said variable output power supply 402 is setby the variable resistor 401 and the start input signal is shifted tothe high-level state, the power amplifiers 403 start to apply the drivevoltages to the motor, thereby starting the motor drive with a frequencysame as the output frequency of the oscillator 126, and the inputs tothe multiplexers MPX1, MPX3 are simultaneously switched. The multiplexerMPX1 selects the input B, or the output of the wave form shaper 101,which converts the drive voltage for the input electrode 100-4a into asquare wave of a required magnitude. Thus the first phase-lock loopfunctions in the same manner as in the stopping of the ultrasonic wavemotor, in synchronization with the drive voltage supplied to the inputelectrode 100-4a, whereby the flip-flops 107-122 provide cyclic signalsof the same frequency as that of the drive voltage, and withpredetermined phase differences. Since said first phase-locked loop issynchronized with the output frequency of said oscillator at thestopping of the ultrasonic wave motor, it can promptly follow the waveform of the drive voltage at the motor starting. In said secondphase-locked loop, the multiplexer MPX3 is switched to select the inputs1B and 2B, so that the comparator φ2 receives the output of said waveform shaper 123 at the SIG input terminal. Said wave form shaper 123converts the output voltage of said monitor electrode into a square waveof a necessary magnitude. Also the COMP input terminal receives theoutput of said multiplexer MPX2, which selects the input A or Brespectively when the direction input signal is at the low- orhigh-level state. In the present example, since the direction inputsignal is assumed to be in the high-level state, the drive voltagesupplied to the input electrode 100-4a is advanced in phase than that tothe electrode 100-4b. Consequently, the multiplexer MPX2 is given,respectively at the inputs A and B, outputs of the shift registercorresponding to φm21 and φm11 in FIGS. 9 and 10, whereby the secondphase-locked loop effects a feedback operation so as to bring the outputof the monitor electrode at the same phase as that of the cyclic signalcorresponding to φm11 or φm21. Even if a signal completely matching φm11or φm21 in phase is not available, a considerably high drive efficiencycan be obtained by selecting a closest output signal of the shiftregister. It is also possible to increase the number of division ofphase by increasing the number of D-flip-flops constituting said shiftregister. Thus the phase comparator φ2 compares the output wave form ofthe monitor electrode and a cyclic signal having a phase difference φm11or φm21 with respect to the wave form of the drive voltage. Since thedirection input signal is assumed to be at the high-level state, themultiplexer MPX2 selects the input B and releases a cyclic signal of aphase difference φm11 with respect to the drive voltage for the inputelectrode 100-4a. As the output of the monitor electrode is delayed inphase with respect to said cyclic signal corresponding to φm11, namelyin a situation φm1>φm11 in FIG. 9, and, if the drive frequency is higherthan the antiresonance frequency F4, the output of the phase comparatorφ2 releases 0 (V) during a period corresponding to said phasedifference. Thus the output voltage of the low-pass filter is lowered toreduce the output frequency of the voltage-controlled oscillator VCO2,thereby reducing the drive frequency toward the antiresonance frequencyF4. Thus the phase difference φm1 becomes smaller. In this state thefirst phase-locked loop functions in constant synchronization with thedrive voltage, so that the multiplexer MPX2 continues to provide acyclic output signal of a phase difference φm11 with respect to thedrive voltage despite of the change in the drive frequency. When thedrive frequency becomes equal to the antiresonance frequency, or whenthe output of the monitor electrode becomes equal in phase to theaforementioned cyclic signal of the phase difference φm11 with respectto the drive voltage, through the above-explained operation, the outputof the phase comparator φ2 is insulated whereby the output of thelow-pass filter is no longer varied. Thus the drive frequency no longervaries and is maintained at the antiresonance frequency. On the otherhand, in case the output of the monitor electrode is advanced in phase,or φm1≦φm11, the drive frequency is lower than the antiresonancefrequency. Thus the SIG input signal of the phase comparator φ2 isadvanced in phase than the COMP input signal, so that said phasecomparator releases the power supply voltage during a periodcorresponding to said phase difference. Consequently the outputfrequency of the voltage-controlled oscillator VCO2 is shifted higher toincrease the drive frequency, thereby increasing φm1 and bringing thedrive frequency toward the antiresonance frequency. When the drivefrequency becomes equal to the antiresonance frequency and the monitorvoltage becomes equal in phase to the cyclic signal corresponding toφm11, the output of the phase comparator φ2 becomes insulated wherebythe drive frequency no longer varies and is maintained at theantiresonance frequency. The drive frequency is thus controlled at theantiresonance frequency, through the above-explained operations, whichare represented in FIG. 35. The aforementioned comparators φ1, φ2 may bereplaced by phase comparators of other types in constituting thephase-locked loops.

When the output voltage of the variable output power supply 402 ischanged by the variable resistor 401, a phase difference between φm11and φm1 is generated due to a change in the antiresonance frequency. Insuch situation the first and second phase-locked loops effect theabove-explained operations to control the drive frequency setting meansso as to maintain the drive frequency at the antiresonance frequency,thereby driving the ultrasonic wave motor constantly at a high driveefficiency.

When the driving direction is switched by shifting the direction inputsignal to the low-level state, the multiplexer MPX2 selects the input Bto release a cyclic signal corresponding to φm21 in FIGS. 9 and 10,whereupon an operation similar to that explained in the foregoing isconducted to maintain the drive frequency at the antiresonancefrequency.

In the following there will be explained a modification for controllingthe drive frequency in a frequency region a shown in FIG. 4, includingthe antiresonance frequency, with reference to FIG. 36. Saidmodification is different from the example shown in FIG. 30 only in thedrive state detecting means 10, and such different part alone is shownin FIG. 36 and will be explained in the following. The aforementionedfirst phase-locked loop is same as explained before and is notillustrated. The antiresonance state detecting means 1 is composed ofsaid first phase-locked loop, a multiplexer 140 (MPX4), D-flip-flops141, 142, known analog multiplexer 143, 144, a variable resistor 145 andthe aforementioned wave form shaper 123. Said multiplexer MPX4, similarto the MPX3, receives the direction input signal at the control terminalCTL, and selects the inputs 1A, 2A or 1B, 2B respectively at the low- orhigh-level state of said direction input signal. The phase differencesat the lower and higher frequencies at φm1, φm2 when the region a inFIG. 4 is applied to FIG. 9 are respectively represented by φm12, φm13,φm22, φm23, and the inputs 1A, 2A, 1B, 2B are respectively given outputsof said shift register corresponding to φm22, φm23, φm12, φm13. Twooutputs of said multiplexer MPX4 are connected to the D input ports ofthe D-flip-flops, of which clock ports CK receive the output of the waveform shaper 123. The outputs Q of said D-flip-flops are connected to thecontrol terminals CTL1, CTL2 of the multiplexer MPX5, which selects theinput A when the terminals CTL1, CTL2 are both in the low-level state,or the input B when the CTL1, CTL2 are respectively in the high- andlow-level states, or the input C when the CTL1, CTL2 are both in thehigh-level state.

The input A of said multiplexer MPX5 is connected to the power supply,while the input B is insulated, and the input C is grounded. The outputof said multiplexer MPX5 is connected to the input B of the multiplexerMPX6, of which the input A receives the output of the variable resistor145.

Said multiplexer MPX6 is connected, at the output thereof, to the drivefrequency setting means 20, and, receiving the start input signal at thecontrol terminal CTL, selects the input A or B respectively at the low-or high-level state of said start input signal. In the low-level stateof the start input signal, the multiplexer MPX6 selects and releases theinput A, whereby the output frequency of said drive frequency settingmeans 20 can be varied by said variable resistor 145, which is thereforeset at a frequency capable of starting the ultrasonic wave motor.

In starting the motor by setting the direction input signal and thestart input signal at the high-level state as in FIG. 30, saidmultiplexer MPX6 selects the input B. Also the multiplexer MPX4 selectsand releases the inputs 1B, 2B because of the high-level state of theterminal CTL, whereby the D-input ports of the D-flip-flops 141, 142respectively receive cyclic signals corresponding to φm12 and φm13.Since the ports CK receive the out,put of the wave form shaper 123,there can be discriminated whether the cyclic signal supplied to eachD-input port is advanced or delayed in phase with respect to the outputvoltage of the monitor electrode, and the output assumes a high- orlow-level state if said cyclic signal is advanced or delayed in phase,respectively. If the outputs Q of the flip-flops 141, 142 are both inthe high-level state, the drive frequency is higher than theaforementioned region c, so that the multiplexer MPX5 selects the inputC. Consequently the input voltage of the voltage-controlled oscillatorVCO2 is reduced to decrease the drive frequency toward the region c. Ifthe outputs Q of the flip-flops 141, 142 are respectively in the high-and low-level states, the drive frequency is positioned within saidregion c. In this case the multiplexer MPX5 selects the insulated inputB, so that the input to the voltage-controlled oscillator VCO2 does notchange and the drive frequency is retained. If said outputs Q are bothin the low-level state, the drive frequency is lower than said region c.In this case the multiplexer MPX5 selects the input A, whereby the inputvoltage of the voltage-controlled oscillator VCO2 is elevated toincrease the drive frequency toward said region c.

As explained above, if the drive frequency is higher or lower than theregion c, it is shifted toward said region c, and, if it is containedwithin said region c, it is retained. When the direction input signal isshifted to the low-level state, the multiplexer MPX4 selects the inputs1A, 2A and a similar operation is conducted.

In this manner the drive frequency is always controlled within a regionc including the antiresonance frequency, whereby a high drive efficiencycan be attained.

Said variable output power supply 402 may be composed of a DC-DCconverter of variable output, as shown in FIG. 37. The output voltage ofsaid DC/DC converter is divided by resistors 410, 411, and the dividedvoltage is compared by a voltage comparator 409 with a voltage obtainedby dividing the voltage of a reference voltage supply 413 with avariable resistor 412. If said output voltage reaches the referencevoltage, the output of an oscillator 415 is intercepted by an AND gate414 to terminate the function of a switching transistor 406. If saidoutput voltage does not reach the reference voltage, said switchingtransistor is activated by said oscillator through said AND gate,thereby elevating the output voltage of said DC/DC converter to thereference voltage. Said output voltage can be easily regulated byvarying the reference voltage with said variable resistor 412. Avariable output power supply can be constructed in simple manner withsuch DC/DC converter.

As an alternative method, a similar result can be obtained by replacingsaid variable output power supply with a fixed output power supply andcontrolling the gain of said power amplifiers.

Also there may be employed a method as shown in FIG. 38, in which saidvariable output power supply 402 is replaced by a fixed output powersupply 421 and the drive voltage is regulated by controlling the on/offtime ratio of power transistors 418, 419 by duty ratio control means417. Said transistors are activated by the cyclic output signal of saidcontrol means 417, and the on-time of said transistors is so selected asnot to exceed 50%. When the voltage supplied to the control terminal ofsaid duty ratio control means 417 is decreased or increased by thevariable resistor 420, the ratio of the on-time is respectively loweredto reduce the drive voltage or elevated to increase the drive voltage.When the drive frequency is varied with said ratio constant, the maximumdrive efficiency is obtained at a drive frequency equal to the antiresonance frequency. Also when said ratio of on-time of the transistorsis varied by said duty ratio control means, the antiresonance frequencybecomes lower as said ratio increases. Also at the antiresonancefrequency, the drive voltage becomes higher and the drive speedincreases as said ratio increases. Consequently the drive speed can bearbitrarily regulated by varying the voltage supplied to said controlterminal, and a high drive efficiency can be attained by the drivefrequency controlling method explained in the foregoing.

As already explained before, the ultrasonic wave motor may run intotroubles such as generation of abnormal noises or an unstable operationstate if the drive voltage is excessively high or low. In order toprevent such drawbacks, the drive voltage setting means 40 is preferablygiven upper and lower limits in the drive voltage, which can beexperimentally determined. Also the output voltage VM of the monitorelectrode is substantially proportional to the amplitude of statoroscillation, and naturally increases or decreases as the drive voltagebecomes larger or smaller. In consideration of this relationship, thedrive voltage setting means 40 may be controlled by said output voltageVM. More specifically, the drive voltage setting means 40 is socontrolled that the output voltage thereof no longer increases ordecreases when the output voltage VM reaches a predetermined maximum orminimum value.

It is naturally possible to easily achieve a feedback control providingan arbitrary drive speed, by replacing, in said drive voltage settingmeans, the variable resistor for setting the drive voltage with speeddetecting means such as a tachogenerator or a pulse encoder coupled withthe rotor of the ultrasonic wave motor, comparing the output of saidspeed detecting means with a reference speed signal corresponding to thedesired speed and accordingly controlling the drive voltage releasedfrom the drive voltage setting means.

FIG. 39 is a timing chart, showing the functions of the circuit shown inFIG. 38.

[6th example]

In the following there will be briefly explained another example of the2nd embodiment of the present invention, with reference to FIG. 40. Inthis 6th example, the drive frequency of the ultrasonic wave motor iscontrolled at the antiresonance frequency, according to the outputvoltage of said monitor electrode 100-4d. FIG. 40 illustrates the drivestate detection means 10 only, as other portions are same as those inthe 5th example.

Said drive state detecting means is composed of monitor voltagedetecting means 150, drive voltage detecting means 151 and a known erroramplifier 152. The monitor voltage detecting means 150 converts theoutput cyclic voltage of the monitor electrode 100-4d into a DC voltageof an appropriate level. The drive voltage detecting means 151 detectsthe output voltage of the variable output power supply 402 and convertsit into an appropriate level. The error amplifier 152 amplifies thedifference between the outputs of said monitor voltage detecting meansand said drive voltage detecting means. Because of the presence of theinductive elements between the power amplifiers and the input electrodesof the ultrasonic wave motor, the drive voltages supplied to said inputelectrodes vary depending on the drive frequency, even if the variableoutput power supply has a constant output, so that the output voltage ofsaid variable output power supply is detected. It is also possible todetect the variable output voltage of the variable resistor 401. In theabsence of said inductive elements, said drive voltages may naturally bedetected. Even in the presence of said inductive elements between thepower amplifiers and the input electrodes, the output voltage of saidvariable output power supply is correlated as shown in FIG. 12 with theoutput voltage of the monitor electrode at the antiresonance frequency.Thus the monitor voltage VMN at the antiresonance frequency becomeshigher as the output voltage of the variable output power supplyincreases, as shown in FIG. 41.

The function of said drive state detecting means will be brieflyexplained in the following. The relationship between the output voltageof said drive voltage detecting means and the output of said monitorvoltage detecting means is so selected as to satisfy the relation shownin FIG. 41, namely in such a manner that output voltage of the drivevoltage detecting means corresponding to the output voltage of saidvariable output power supply coincides with the output of the monitorvoltage detecting in response to said output voltage VMN at said outputof the variable output power supply. Said error amplifier compares theoutputs of said drive voltage detecting means and said monitor voltagedetecting means. As the latter is lower in case the drive frequency ishigher than the antiresonance frequency, the output voltage of saiderror amplifier decreases to reduce the drive frequency whereby theoutput voltage VMN of the monitor electrode increases. On the otherhand, if the drive frequency is lower than the antiresonance frequency,the output voltage of the monitor voltage detecting means is higher thanthat of the drive voltage detecting means, so that the output voltage ofsaid error amplifier increases to elevate the drive frequency wherebythe output voltage VMN of the monitor electrode decreases. Through theoperations explained above, the drive frequency setting means 2 is socontrolled that the outputs of said drive voltage detecting means and ofthe monitor voltage detecting means mutually coincide, whereby the drivefrequency is controlled at the antiresonance frequency. In case of FIG.41, as an almost linear relationship stands between the output of saidvariable output power supply and the output voltage VMN, the drivefrequency can be easily controlled at the antiresonance frequency byvarying the drive speed with said variable resistor.

Also in case said relationship is not linear, the drive frequency can beeasily controlled at the antiresonance frequency by investigating, inadvance, the relation of VMN and the output voltage or the drivevoltage.

[7th example]

In the following there will be explained, with reference to FIG. 42,another example of the 2nd embodiment of the present invention, forcontrolling the drive frequency at the antiresonance frequency in casethe inductive elements are connected between the power amplifiers andthe input electrodes of the ultrasonic wave motor, according to thephase difference between the voltages across said inductive element,namely the phase difference between the output voltage of the poweramplifier and the drive voltage.

The example shown in FIG. 42 is same as the 4th example shown in FIG.30, except the drive state detecting means 1. In the present example, aninput port of the wave form shaper 101 is connected to the output of thepower amplifier for supplying electric power to the input electrode100-4a, and an input port of the wave form shaper 123 is connected tosaid input electrode 100-4a. In the present example the multiplexer MPX2is omitted because the phase difference between the voltages across theinductive element is not varied, unlike the 5th example, by theswitching of the driving direction. The function when the ultrasonicwave motor is stopped by the low-level state of the start input signalis same as that in the 5th example.

When the start input signal is shifted to the high-level state forstarting the motor, there are given drive voltages with a frequencyreleased from the oscillator 126, and the multiplexers MPX1, MPX3 areswitched to the inputs B, 1B and 2B.

The first phase-locked loop functions in synchronization with the outputvoltages of the power amplifiers, whereby the D-input signal to theD-flip-flop 107 becomes same in phase as the output of said wave formshaper 101, and the D-flip-flops 107-122 constituting the shift registerprovide respectively cyclic signals of predetermined phase differencesas explained in the 5th example. Among said cyclic signals, an outputsignal corresponding to φv1 shown in FIG. 14 is selected and supplied tothe input 1B of the multiplexer MPX3. If a completely coinciding signalis not available, there may be taken measures as explained in the 5thexample.

The input 2B of the multiplexer MPX3 is given the output of the waveform shaper 123, whereby the second phase-locked loop so functions as tocancel the phase difference between said cyclic signal corresponding toφv1 and the output of said wave form shaper 123 or the drive voltageapplied to said input electrode 100-4a. For example if the output of thewave form shaper 123 is advanced in phase with respect to the cyclicsignal corresponding to φv1, there stands a situation φv<φv1 and thedrive frequency is higher than the antiresonance frequency. In such casethe phase comparator φ2 releases 0 V according to the phase difference,whereby the output voltage of the low-pass filter composed of a resistor201 and a capacitor 203 is lowered and the drive frequency is decreasedtoward the antiresonance frequency. When both signals coincide in phase,the output of the comparator φ2 is insulated. Thus the output of thelow-pass filter no longer varies and the drive frequency is retained atthe antiresonance frequency. On the other hand, in case the drivevoltage is delayed in phase in comparison with said cyclic signalcorresponding to φv1, there stands a situation φv>φv1 and the drivefrequency is lower than the antiresonance frequency. In such case thecomparator φ2 releases the power supply voltage according to the phasedifference, whereby the output voltage of said low-phase filter iselevated to increase the drive frequency. When both signals coincide inphase, the output voltage of said low-pass filter is retained, and thedrive frequency is retained at the antiresonance frequency. Also in casethe antiresonance frequency varies due to a change in the ambientconditions in the course of motor operation, the drive frequency isconstantly maintained at the antiresonance frequency through a similaroperation.

8th example

In the following there will be explained another example in which, indriving the ultrasonic wave motor by connecting the inductive elementsbetween the power amplifiers and the input electrodes of said motor asin the 7th example, the drive frequency is controlled at theantiresonance frequency by a change in the drive voltage, with referenceto FIG. 43 in which the frequency dividing/shifting means 30 and thedrive voltage setting means 40 are omitted as they are same as thoseshown in FIG. 30. The drive state detecting means 10 is composed of anA/D converter 160 and a microcomputer (CPU) 161, while the drivefrequency setting means 20 is composed of a programmable oscillator(POSC) 162. Said microcomputer receives the wave form of the drivevoltage supplied to the input electrode 100-4a in the form of digitaldata through said A/D converter. Said programmable oscillator 162 isconnected with the microcomputer 161 through a bus, and the outputfrequency is determined by an instruction from said microcomputer. Thedrive frequency is thus controlled by said microcomputer 161. A controlon the programmable oscillator 162 to vary the output frequency thereofso as to minimize the drive voltage received from said A/D converter 160corresponds to an adjustment in FIG. 16 of bringing the voltage VI toVIL, so that the drive frequency is controlled at the antiresonancefrequency.

It is also possible to detect the voltage VL applied to said inductiveelement by the CPU through an unrepresented additional A/D converter,determine the VIL from the relation shown in FIG. 17, and control theprogrammable oscillator by the CPU so as to obtain a drive frequencycorresponding to the VIL in this state.

9th example

A next 9th example effects control by the phase difference between thecurrent flowing into the input electrode and the drive voltage. In thiscase, as shown in FIG. 44, a current detecting element such as a Hallelement 170 is provided at the junction between the input electrode andthe power amplifier or the inductive element, thereby detecting thecurrent flowing into said input electrode, and the drive frequency iscontrolled so as to bring the phase difference φi shown in FIG. 18 toφiN through a process similar to that of the 5th example. In this casethe multiplexer MPX2 is omitted since the phase difference φi does notvary by the driving direction so that the signal corresponding to φiNneed not be switched according to the driving direction. An amplifier171 is provided for amplifying the output of the Hall element, and sendsthe output to the wave form shaper 123. The function of this example issimilar to that of the foregoing examples and will not, therefore, beexplained further.

10th example

A 10th example is shown in FIGS. 45 and 46. FIG. 45 is a schematic viewshowing the structure of the present example, in which, different fromthe foregoing examples, the drive speed is regulated by varying thedrive frequency through the drive frequency setting means, and the drivestate detecting means 10 controls the drive voltage setting means 40 tovary the drive voltage thereby setting said drive frequency at theantiresonance frequency.

In the present example, the antiresonant state is detected from thephase difference φm between the output voltage of the monitor electrodeand the drive voltage. Referring to FIG. 9, if the phase difference atthe antiresonance frequency is in a state φm1<φm11 or φm2<φm21, thedrive frequency is lower than the antiresonance frequency. Thus,according to the relationship between the drive voltage and theantiresonance frequency shown in FIG. 7, an increase in the drivevoltage reduces the antiresonance frequency whereby the phasedifferences φm1, φm2 increase without change in the drive frequency torealize a state φm1=φm11 or φm2=φm21. On the other hand, in case of φm1>φm11 or φm2>φm21, where the drive frequency is higher than theantiresonance frequency, a reduction of the drive voltage elevates theantiresonance frequency, whereby the phase differences φm1, φm2 decreasewithout change in the drive frequency to realize a state φm1=φm11 orφm2=φm21. Thus the drive frequency can be matched with the antiresonancefrequency.

In brief, the drive frequency setting means 20 is composed of variableresistors 204, 205, a known analog multiplexer 206 (MPX7), a resistor207, a capacitor 208, and a voltage-controlled oscillator VCO2 same asthat in the 4th example. Said multiplexer MPX7 selects the output of thevariable resistor 204 in case the start input signal is at the low-levelstate, or the output of the variable resistor 205 in case said startinput signal is at the high-level state, or the input C connected to thepower supply to the grounded input D according to the outputs to thedrive voltage detecting means 430, 431 to be explained later. Saidvariable resistor 204 is provided for setting the drive frequency at themotor starting and is so set to obtain a drive frequency capable ofstarting the motor from the voltage-controlled oscillator VCO2. Morespecifically, said starting drive frequency is preferably selectedhigher than the drive frequency where the drive voltage is minimum andthe drive speed is maximum, and lower than the drive frequency higherthan the above-mentioned drive frequency, where the drive voltage ismaximum and the drive speed is zero. More preferably said drivefrequency is matched with the antiresonance frequency. As the output ofthe variable resistor 205 is selected while the motor is driven, thedrive speed is regulated by said variable resistor 205. As the output ofsaid drive frequency setting means 20 is divided into 1/4 by thefrequency dividing/shifting means 30 to provide the drive frequency, theoutput frequency of said VCO2 is selected at 4 times of the drivefrequency.

The drive voltage setting means 40 is different from that of the 5thexample shown in FIG. 30 in that a low-pass filter composed of aresistor 407 and a capacitor 408 is connected between the input of thevariable output power supply 402 and the output of the drive statedetecting means 10, and that the multiplexer MPX8 selects the output ofa variable resistor 406 or the output of said drive state detectingmeans 10 respectively when the start input signal is at the low- orhigh-level state. The variable resistor 409 sets the output voltage ofthe variable output power supply 402 at the motor starting. The drivestate detecting means 10, functioning as in the 1st example, is composedof a first phase-locked loop for generating cyclic signals with phasedifferences φm11 and φm21 with respect to the drive voltage, amultiplexer MPX2 for selecting said two cyclic signals according to thedriving direction, and a phase comparator φ2 for detecting the phasedifference between the cyclic signal selected by said multiplexer MPX2and the output voltage of the monitor electrode. The wave form shapers101, 123 are same as those shown in FIG. 30. Said phase comparator φ2receives the output of the wave form shaper 123 and the output of themultiplexer MPX2 respectively at the SIG input and COMP input.

Thus, in case the phase difference φm1 or φm2 between the drive voltageand the output voltage of the monitor electrode is in a state φm1<φm11or φm2<φm21, the drive frequency is lower than the antiresonancefrequency and the SIG input of the comparator φ2 is advanced in phase incomparison with the COMP input. Thus the comparator φ2 releases thepower supply voltage according to said phase difference to elevate theoutput voltage of said low-pass filter, whereby the output voltage ofthe variable output power supply is elevated to increase the drivevoltage for the ultrasonic wave motor, thus reducing the antiresonancefrequency. In the opposite case, the comparator φ2 releases 0 Vaccording to the phase difference to lower the output voltage of saidvariable output power supply, whereby the drive voltage is reduced toincrease the antiresonance frequency. When a state φm1=φm11 or φm2=φm21is reached through the above-explained operation, the output of thecomparator φ2 is insulated whereby the drive voltage is maintainedconstant. Thus the drive frequency is controlled at the antiresonancefrequency.

The ultrasonic wave motor may show troubles such as generation ofabnormal noises or an unstable operation if it is driven in the vicinityof the resonance frequency, or with a frequency significantly differentfrom the originally designed drive frequency, or with an excessivelyhigh or low drive voltage. Consequently the region of the outputfrequency of the voltage-controlled oscillator VCO2 is preferablyselected at least higher than a frequency where the output voltage ofsaid variable output power supply is minimum and the drive speed ismaximum, and lower than a higher frequency where the output voltage ofthe variable output power supply is maximum and the drive speed is zero,in order to avoid unnecessarily high or low drive voltage, therebyrealizing a stable operation. However, if the voltage-controlledoscillator cannot satisfy such conditions, there may be detected theoutput frequency of the VCO2 and controlled the input to the VCO2 so asto satisfy the above-explained conditions, or there may be employed theprocedure of the present example.

In brief, if the maximum drive voltage obtainable with the drive voltagesetting means 40 is reached, the input voltage to the voltage-controlledoscillator VCO2 is so controlled that the drive frequency does notbecome lower than the value corresponding to said maximum drive voltage,and, in this manner the drive frequency of the ultrasonic wave motordoes not come close to the resonance frequency where the motor operationbecomes unstable. For this purpose the aforementioned drive voltagedetecting means is composed of voltage comparators 430, 431 and servesto control the multiplexer MPX7, thus avoiding the above-mentionedtroubles in the course of operation of the ultrasonic wave motor. Whenthe voltage comparator 430 detects that the output voltage of thevariable output power supply has reached the upper limit, themultiplexer MPX7 selects the input C connected to the power supply,whereby the input voltage of the voltage-controlled oscillator VCO2 iselevated to increase the drive frequency. Thus the output voltage of thevariable output power supply is reduced, thus reducing the drivevoltage. When the output of the voltage comparator 430 is inverted bythe decrease of the output of the variable output power supply and themultiplexer MPX7 again selects the variable resistor 205, the output ofthe variable output power supply is elevated. When said output againreaches the upper limit through this operation, the above-explainedsequence is repeated, so that the drive frequency does not come close tothe resonance.

Also in case of increasing the drive frequency by the variable resistor205 in order to reduce the drive speed, there is selected a minimumdrive voltage in said drive voltage setting means and the input to thevoltage-controlled oscillator VCO2 is so controlled that the drivefrequency does not go higher when the drive voltage reaches said minimumvalue. This is achieved by switching the multiplexer MPX7 to thegrounded input D, upon detection by the voltage comparator 431 that theoutput voltage of the variable output power supply has reached the lowerlimit, thereby reducing the drive frequency and thus elevating the drivevoltage. This method not only avoids the unstable operation in thevicinity of the resonance frequency but also allows to set a limit inoperation at high drive frequency and low drive speed, therebyconstantly providing a stable operation. In FIG. 46, Vu and V1,connected to input ports of the voltage comparators 430,431 arereference voltage supplies for setting the upper and lower limits ofsaid variable output power supply.

Also there can be prevented troubles of the ultrasonic wave motor suchas generation of abnormal noises or unstable operation, encountered incase of an excessively high or low drive voltage.

The foregoing examples are designed to maximize the drive efficiency,but it is also possible to effect the control so as to maximize thestart torque. It is experimentally confirmed by the present inventorthat for a constant drive voltage, the drive frequency F5 providing themaximum start torque is, as shown in FIG. 4, different from and slightlyhigher than the drive frequency providing the maximum drive efficiency,and that said drive frequency providing the maximum start torque variesin a similar manner as the drive frequency providing the maximum driveefficiency, in response to a change in the drive voltage. Thus the starttorque can be maximized through a control similar to that for maximizingthe drive efficiency. More specifically, for a drive voltage set by thedrive voltage setting means, the drive frequency setting means is socontrolled as to bring the drive frequency of the ultrasonic wave motorto the drive frequency maximizing the start torque, according to theoutput of the drive state detecting means. As an example, in case ofcontrol with the phase difference φm, the drive frequency maximizing thestart torque is determined experimentally, and the drive frequency is socontrolled as to attain a corresponding phase difference. In case thedrive frequency is determined in advance, the drive voltage may becontrolled so as to attain said phase difference.

A control to a drive frequency providing the maximum output is likewisepossible. It is experimentally confirmed that the drive frequency F6providing the maximum output, as shown in FIG. 4, is lower than thefrequency providing the maximum drive efficiency but higher than thefrequency providing the maximum speed, and that such frequency providingthe maximum output varies similarly to the frequency providing themaximum efficiency, depending on the drive voltage. Also in this casethe control can be conducted in a similar manner as in the case ofcontrol for the maximum efficiency, for example by the control of thedrive frequency according to the phase difference φm. More specificallya phase difference φm corresponding to the drive frequency providing themaximum output is experimentally determined in advance, and the drivefrequency is so controlled as to constantly attain said phasedifference.

It is therefore possible to maintain the ultrasonic wave motor in theoptimum drive state according to the required conditions, by selectingthe control for maximizing the drive efficiency, for maximizing thestart torque, or for maximizing the output. For example, the motor maybe started under the control providing the maximum start torque, anddriven with a constant speed under the control maximizing the driveefficiency, and accelerated under the control maximizing the output.

The present invention is not limited to the control for maximizing thedrive efficiency, start torque or output but can also be applied to thecontrol to a drive frequency providing any other drive state. Also thedesired drive state may be suitably switched or varied in continuousmanner.

As explained in the foregoing, the drive state of the ultrasonic wavemotor can be controlled to a desired state, by detecting the drive stateof said motor by the drive state detecting means.

Similar controls are naturally applicable also to the example shown inFIG. 45.

I claim:
 1. A device for driving an ultrasonic wave motor, comprising:adrive frequency setting circuit for setting the frequency of a drivesignal for said ultrasonic wave motor, said drive frequency settingcircuit having a reference signal generating circuit for generating areference signal corresponding to a frequency maximizing the torque atthe starting of said motor; a phase shifting circuit for generatingcyclic signals with a mutual phase difference, based on the output ofsaid drive frequency setting circuit; a drive voltage setting circuitfor transforming said cyclic signals from said phase shifting circuitinto voltages for driving said ultrasonic wave motor; and a drive statedetecting circuit for detecting the drive state of said ultrasonic wavemotor and producing a drive state detecting signal on the basis of thedetected drive state, said drive frequency setting circuit setting thedrive signal frequency at a frequency corresponding to said referencesignal on the basis of said reference signal and said drive statedetecting signal.
 2. A device for driving an ultrasonic wave motor,comprising:a drive frequency setting circuit for setting the frequencyof a drive signal for said ultrasonic wave motor; a phase shiftingcircuit for generating cyclic signals with a mutual phase difference,based on the output of said drive frequency setting circuit; a drivevoltage setting circuit for transforming said cyclic signals from saidphase shifting circuit into voltages for driving said ultrasonic wavemotor, said drive voltage setting circuit having a reference signalgenerating circuit for generating a reference signal corresponding to avoltage magnitude maximizing the torque at the starting of said motor;and a drive state detecting circuit for detecting the drive state ofsaid ultrasonic wave motor and producing a drive state detecting signalon the basis of the detected drive state, said drive voltage settingcircuit setting the drive voltage at a voltage magnitude correspondingto said reference signal on the basis of said reference signal and saiddrive state detecting signal.
 3. A device according to claim 1, whereinsaid ultrasonic wave motor is of a type including an elastic member anda piezoelectric member provided with at least a pair of inputelectrodes, and wherein said voltages for driving said ultrasonic wavemotor are applied to said pair of input electrodes.
 4. A deviceaccording to claim 2, wherein said ultrasonic wave motor is of a typeincluding an elastic member and a piezoelectric member provided with atleast a pair of input electrodes, and wherein said voltages for drivingsaid ultrasonic wave motor are applied to said pair of input electrodes.